MiDAS in Glovebox series are a member of Vaksis MIDAS COATING SYSTEMS platforms which composed of prismatic vacuum chambers and involve different techniques and combinations.

  • Ultimate Vacuum Pressure ≤ 5x10-8 Torr
  • Number of Chambers up to 2 per GB
  • Substrate Size 4”- 8” diameter
  • Substrate Heating max. 800o
  • Substrate Rotation 3-30 rpm
  • Cooling Where necessary
  • Deposition Mode Upward
  • Load lock chamber Optional
  • Glovebox Impurities <1 ppm oxygen (O2) and moisture (H2O) 
  • Control Fully Automatic


  • DC and/or RF Power Supply for Sputtering Magnetron Source
  • Effusion Cell A.C. Power Supply for Metal and/or Organic Evaporation Sources
  • High-Current Low-Voltage A.C. Power Supply for Resistive Thermal Evaporation Source
  • Power Supply for Electron Beam Evaporation Source

Other PVD Systems