Architectural Glass Coating System. Vaksis MiCKS platform is composed of prismatic vacuum chambers and involve the magnetron sputtering technique on glass panes or large wafers. It is mostly used for low-e coatings, anti-reflection coatings, electrochromic coatings, transparent conductive oxide coatings, nitride resistors, high conductivity coatings, etc.

  • Ultimate Vacuum Pressure ≤ 5x10-8 Torr
  • Substrate Size up to 30x30 cm
  • Substrate Heating max. 400o
  • Cooling  Where necessary
  • Deposition Mode Upward/Downward
  • Number of Sources  Up to 10
  • Loading Using Load Lock Chamber 
  • Control  Fully Automatic




  • DC and/or RF Power Supply for Sputtering Magnetron Source

Other PVD Systems