MiDAS Twin series is a member of Vaksis MiDAS COATING SYSTEMS platforms comprised of two chambers with a common pumping station. The series are composed of prismatic vacuum chambers and involve different techniques and combinations.

Ultimate Vacuum Pressure ≤ 5x10-8 Torr
Number of Chambers 2
Substrate Size 4”- 8” diameter
Substrate Heating max. 800o
Substrate Rotation 3-30 rpm
Cooling Where necessary
Deposition Mode Upward
Load lock chamber Optional
Control Fully Automatic




  • DC and/or RF Power Supply for Sputtering Magnetron Source
  • Effusion Cell A.C. Power Supply for Metal and/or  Organic Evaporation Sources
  • High-Current Low-Voltage A.C. Power Supply for Resistive Thermal Evaporation Source
  • Power Supply for Electron Beam Evaporation Source

Other PVD Systems