Vaksis GünEr platform is composed of many vacuum chambers and a load lock chamber. This platform has a circular cluster structure and involves different techniques and combinations.

  • Ultimate Vacuum Pressure ≤ 5x10-8 Torr
  • Number of Process Chambers up to 8
  • Number of Load Lock Chamber 1
  • Number of Robotic Transfer Chamber 1
  • Substrate Size30x30 cm
  • Substrate Heating max. 400oC
  • Cooling Where necessary
  • Loading With Load Lock and Transfer Chamber
  • Control Fully Automatic
  • Additional Gas SafetyAvailable Upon Request

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Other Multi Technique