PVD handy 4O
Evaporation system for organic materials for OLED and OPV applications. The system allows multi-layer deposition of four dissimilar materials or co-deposition of two dissimilar materials in the same loading.
- Base Pressure < 2x10-7 Torr
- Leak Rate < 10-8 Torr.l/s
- Substrate Holder: max. 4 substrates with the size of 1"x1"
- Substrate Rotation: 8 rpm
- Substrate Heating: Max. 2500C
- Deposition Sources: 4 pcs Organic Evaporation Sources
- Thickness Measurement: In-situ measurement with Quartz X-tal Oscillator
- Number of Thickness Sensors: 2
- Temperature Control System: PID method
- Power Generators: 4
- Control: Full automation by PC
For more detailed information, send an e-mail to info@vaksis.com.
