The system has been especially designed for producing graphene and carbon nano-tube (CNT) on the proper substrates. Similarly, if proper carrier gas molecules are used, it is also possible to produce nanowire from variety of materials (such as, ZnO, GeO, etc.) using the system.

  • Base Pressure < 1x10-5 Torr
  • Leak Rate< 10-6 Torr.l/s
  • Quartz Tube Diameter 130 mm​
  • Max. Temperature  1000oC
  • Continuous Working Temperature 950oC
  • Heating Area Length  Min.200 mm
  • Number of MFC Min. 3
  • Loading  From one end of the quartz tube​
  • ControlFully Automatic on PC
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Other Low Pressure CVD