This system is particularly designed to heat samples at various linear heating rates under vacuum and under low-pressure controlled atmosphere. Maximum temperature attainable with this system is 1000 oC. The linear heating rate range is in between 0.5 to 30 oC/sec.

  • Base Pressure < 2x10-7 Torr
  • Leak Rate 10-8 Torr.l/s
  • Time to reach <10E-5 Torr 10 min.
  • Linear Heating Rate Range 0.5 - 30 oC
  • Max. Temperature  1000oC
  • Temperature Measurement Thermocouple
  • Number of MFC 2
  • Max. number of MFC 4
  • Process Pressure Range 5x10-3 - 5x10-1 Torr
  • Heating Pressure Range 5x10-1 Torr to Base pressure
  • Control Full Automation by PC
DOWNLOAD BROCHURE

For more detailed information, send an e-mail to info@vaksis.com.

Other Rapid Thermal Annealing